檢測認證人脈交流通訊錄

主要技術指標:Front pneumatically locking sliding door for easy source and substrate access Motorised substrate rotation Full computer control with recipe functions Optional Datalogging 1 x 10-7 mbar base pressure Pneumatic source and substrate shutters Uniformity +/- 5% for all sources
功能/應用范圍:Mini-SPECTROS SPECTROS 100/150 Super-SPECTROS 150/200
主要測試和研究領域:電子/信息技術
儀器負責人:方鳴佳
電話:51355288
電子郵件:sme@fudan.edu.cn


